Contact: Jessica Cree - Inside Sales Support
                        18690 Hale Avenue
                        Morgan Hill, CA 95037
                        PH: 408.782.5850 FX: 408.782.5852


ADVANCED ENERGY - DC & RF Power Supplies

DC Supplies for Magnetron Sputtering and Ion Source Applications

RF Generators/Tuning Networks-Mid Frequency to 13.56MHz
ICP and Ion Beam Sources

  ANCORP - HIGH & UHV Vacuum Componets
ISO-KF, QF, ASA and CF Flanges, Fittings, and Valves
All Metal Seal (UHV), Quick Clamp Flange and Fittings
Custom Flanges and Chamber Fabrications
  BEACON MEDAES - Gas Delivery Systems
Lab Air & Lab Vacuum Systems
Gas Generators
High Purity Manifolds and Gas Delivery Equipment
Vacuum Jacketed Piping for Cryogenic Applications
  DELCOM - Non-contact Sheet Resistance Meter
Measure Sheet Resistance, Thickness, and Resistivity
For Glass, Wafers, Film, Roll to Roll, PV, etc.
Non-destructive, penetrates insulation, real-time
Benchtop and Inline Solutions
  EDWARDS VACUUM - Vacuum Pumps
Rotary Vane, Scroll, and Dry Rough Pumps
Conventional & MAGLEV Turbo Pumps
Vacuum Gauging
Custom Pumping Systems

Planar and rotatable magnetron sources
Linear Ion Sources
Optix, Gas Sensor for Vacuum Processes

Speedflo, Reactive Process Controllers
  HIDEN ANALYTICAL – RGA & Plasma Diagnostics
Open and Closed Source RGA 50amu Thru 2500amu
Plasma Monitoring and Characterization
Ion Milling End Point Detectors
  KAUFMAN & ROBINSON - Ion & Plasma Sources
Grid-less low energy, high current sources
Gridded RFICP & Kaufman DC sources
Ion / Plasma source power supplies and controllers


Step Height, Roughness, Waviness Measurements
Stress Measurement

50 ang – 1.2mm feature height
2D and 3D Profile Scans

ZDot Based Optical Profilers
Measure low contrast, high roughness surfaces

True Color Imaging & Microscopy Capable
Automated Optical Inspection Options

    NANOINDENTERS (Nanomechanics)
Accurate measurement on harness and modulus
Scratch, dynamic testing, SPM & high temperature indentation

Mapping - NanoBlitz 3D allows up to 1s/indent
Continuous Stiffness Measurement supports modulus and hardness as a function of indentation depth

    THIN FILM MEASUREMENT (Filmetrics F-Series)
High resolution single spot
Small spot-size rough film thickness

Site mapping, programmable, in-situation OEM
IR-VIS-UV spectrums

  MEIVAC – Thin Film Vacuum Products
eVap Thin Film Products
MAK Magnetron Sputter Sources
Substrate Heaters - Up to 950C
Vari-Q Throttle Valves
  MPF PRODUCTS - Ceramic Feedthroughs

  NUANCE SYSTEMS - Gas/Chemical Delivery Systems
Bubblers/Cylinders, electro-pnuematic systems
Gas/vacuum line fabrication in cleanroom environments. CAD Services.
Gas cabinets, valve manifold boxes, pigtail spares, orbital                         welding.

  ULVAC - Spectroscopic Ellipsometer
Quick thickness measurement speed
Low cost of ownership
Compact design
User friendly operation, software, and maintenance


VACGEN - Manipulators & Vacuum Components
High Precision XYZ Manipulation
Rotary/Linear Drives & Linear Shifts
Transfer & Transport Devices
Sample Holders & Heating/Cooling Controllers

  VAT - Vacuum Valves & Edge-Welded Bellows
HV & UHV Gate & Angle Valves
All Metal Gate & Angle Valves
Control Valves, Transfer Valves, Variable Leak Valves
Large gate and transfer valves
Edge-Welded Bellows